Controlling the flow up to 70m3/h with a pressure from 10 to 500Pa, measured on the device to be tested (DUT).
This can also be an under pressure instead of an over pressure. Thereby this system is suitable to test heat exchange units. One circuit can be pressure control to a level, and the other circuit tested on leakages.
For testing a very precise defined leak (orifice) for the semiconductor industry is made. Under several pressures
the assembly is tested with an accurate flow measurement, connected to a Codesys based PLC system.